MEMS + FT-IR

Bringing semiconductor advantages to the spectroscopy industry

Throughout its history, the semiconductor industry has proven its ability to integrate functions on a chip. These chips can be supplied in very high volumes and at low costs, opening the door for new unprecedented applications and markets in multiple industries.

The spectrometry instrumentation industry is no longer an exception with NeoSpectra

MEMS + FT-IR = Neo-Spectra

What is
FT-IR spectroscopy?

Spectroscopy is the study of physical and/or chemical properties of materials by analyzing their response to light. Knowing that each chemical component has a unique spectral pattern, the analysis of the spectral response of matters tells a lot about their chemical composition and/or concentration. Today, spectrometer instruments can be found in labs and industrial environments for material identification and/or quantification in different application areas. There are many conventional topologies for spectrometry instrumentation including Fourier Transform InfraRed (FT-IR) that offers several performance and cost advantages.

What is
MEMS ?

Micro Electro Mechanical Systems (MEMS) are chip-based electro mechanical elements that are developed with techniques inherited from the semiconductor microfabrication technologies. Electro mechanical designs are first printed on masks, these masks are used to pattern the design over silicon wafers by photolithography, the patterns are then etched using batch processes, and finally chips are diced and packaged. Over the last decades, MEMS chips revolutionized several industries to the point that, today, MEMS chips can be found in a multitude of electronic devices.

The “Neo” way for FT-IR

In NeoSpectra, all the optical and mechanical components are integrated on single MEMS chip, enabling FT-IR functionality on a chip scale. The monolithic integration is enbaled by using Si-Ware Systems’ proprietary Silicon integrated Micro Optical Systems Technology (SiMOST) platform.

The “Neo” way versus Conventional

FeatureConventionalNeoSpectra
Core engineBulky Michelson interferometer with discrete optical, mechanical, and electrical components.Single-chip Michelson interferometer with monolithic opto-electro-mechanical structure.
Optical alignmentMisalignment in interferometers’ components deteriorates performance.Components are intrinsically aligned by lithography.
Measuring the position of the moving mirrorAdditional interferometer with He-Ne Laser for position sensingOn-chip electrical sensing of capacitance between the motor driver and a fixed structure